Efficient finite element method for grating profile reconstruction
نویسندگان
چکیده
منابع مشابه
Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques
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ژورنال
عنوان ژورنال: Journal of Computational Physics
سال: 2015
ISSN: 0021-9991
DOI: 10.1016/j.jcp.2015.09.016